ASM International and Hitachi Kokusai Sign Licensing Agreement for
Atomic Layer Deposition Technology
BILTHOVEN, The Netherlands, November 27, 2007 - ASM International
N.V. (Nasdaq: ASMI and Euronext Amsterdam: ASM) and Hitachi Kokusai
Electric Inc. (Tokyo Stock Exchange (1st Section), and Osaka
Securities Exchange (1st Section): Hitachi Kokusai Electric Inc.)
announced today that they have signed a licensing agreement.
According to this agreement ASM grants usage of its Atomic Layer
Deposition (ALD) patents in the field of use of batch ALD to Hitachi
Kokusai Electric Inc. Detailed terms of the agreement were not
ASM has been a pioneer in ALD for many years and owns a substantial
patent portfolio, including ALD patents and patents relating to batch
ALD processing in a vertical furnace. With this technique it is
possible to use ALD in a vertical furnace and process multiple wafers
at the same time. This can give significant cost-of-ownership
benefits for various ALD applications.
Dr. Albert Hasper, general manager of ASME commented: "ASM is
renowned for its power of innovation, particularly in the area of
ALD. Company policy for years has been to invest strongly in
innovation and its protection. We are pleased that Hitachi Kokusai
Electric Inc. recognized the value of this IP portfolio and that we
have reached this agreement in a professional and business manner to
the benefit of both companies. We believe it is in the best interest
of the semiconductor industry to license this technology and allow
another supplier to join us in serving the rapidly growing need for
cost-effective ALD processing capabilities."
Mr. Shoichiro Izumi, general manager of Hitachi Kokusai Electric Inc.
commented: "We have been proceeding the development of Batch ALD over
a period of time, and contributing to our customers' production of
excellent semiconductor devices. We believe that this agreement will
make progress in development of ALD technologies, and that we will
contribute much further to our customers' advantage."
ASM International N.V. and its subsidiaries design and manufacture
equipment and materials used to produce semiconductor devices. The
company provides production solutions for wafer processing (Front-end
segment) as well as assembly and packaging (Back-end segment) through
facilities in the United States, Europe, Japan and Asia. ASM
International's common stock trades on NASDAQ (symbol ASMI) and the
Euronext Amsterdam Stock Exchange (symbol ASM). For more information,
visit ASMI's web site at www.asm.com.
About Hitachi Kokusai Electric Inc.
Hitachi Kokusai Electric Inc. designs and manufactures Wireless
Communication and Information System, Broadcasting and Video Systems,
and Semiconductor Manufacturing Systems, and globally provides those
systems to the United States, Europe, Asia, etc. Hitachi Kokusai
Electric Inc.'s common stock trades on Tokyo Stock Exchange (1st
Section), and Osaka Securities Exchange (1st Section). For more
information, visit Hitachi Kokusai Electric Inc.'s web site at
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Naud van der Ven +31 30 229 8540
Erik Kamerbeek +31 30 229 8500
Mary Jo Dieckhaus +1 212 986 2900
Contact Hitachi Kokusai Electric Inc.
Akira Makita +81-3-6734-9401