ASM Wins New ALD Business in Japan at Multiple High-K Logic Gate
ALMERE, THE NETHERLANDS, July 29, 2009 - ASM International N.V.
(NASDAQ: ASMI and Euronext Amsterdam: ASM) (www.asm.com), today
announced that it has sold its PulsarÂ® Atomic Layer Deposition (ALD)
system for high-k gates to two top Japanese logic device
manufacturers for insertion in the 32/28nm technology node. The tools
will be used for hafnium-based high-k gate dielectrics, as well as
for the dielectric capping layers used to tune work function of the
gate stack. One customer also ordered ASM's EmerALDÂ® process module
for metal gates.
"These orders further extend our leadership position in delivering
manufacturing solutions for high-k gates, having now shipped well
over 100 Pulsar ALD tools," said Bob Hollands, Director of Marketing
for Transistor Products at ASM. "The performance benefits of high-k
films deposited in the Pulsar, and our customer-focused approach that
enables process integration solutions, were key factors in gaining
these new customers. With process integration knowledge for high-k
gates growing, we are seeing the adoption of high-k metal gates now
accelerate rapidly. The combination of Pulsar and EmerALD
demonstrates the benefit of ASM's capability to deposit in a
clustered system the high-k film, the dielectric capping layer and
the metal electrode."
About ASM International
ASM International N.V., headquartered in Almere, the Netherlands, and
its subsidiaries design and manufacture equipment and materials used
to produce semiconductor devices. ASM International and its
subsidiaries provide production solutions for wafer processing
(Front-end segment) as well as assembly and packaging (Back-end
segment) through facilities in the United States, Europe, Japan and
Asia. ASM International's common stock trades on NASDAQ (symbol ASMI)
and the Euronext Amsterdam Stock Exchange (symbol ASM). For more
information, visit ASMI's website at www.asm.com.
Safe Harbor Statement under the U.S. Private Securities Litigation
Reform Act of 1995: All matters discussed in this statement, except
for any historical data, are forward-looking statements.
Forward-looking statements involve risks and uncertainties that could
cause actual results to differ materially from those in the
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the Company's reports on Form 20-F and Form 6-K. The Company assumes
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Tel: +31 88 100 8500
Mary Jo Dieckhaus
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